Alicona Infinite Focus IFM G4

Purpose

Optical surface characterisation

Specifications

• — Non-contact optical 3 dim. surface digitisation based on Focus-Variation
• — Surface profile form and roughness measurement
• — Surface topography Ra above 10-15 nm with a Lc of 2um, surface structure dependent
• — Minimum vertical repeatability less than 0.12
• — Best vertical resolution in the range of 10 to 410 nm
• — Fully automated and programmable xyz stages
• — 5x, 20x, 50x and 100x objective