Rapid Thermal Annealer (RTA)

Jipelec, JetFirst

Social Distancing Instructions: Room occupancy limit of six, bay occupancy limit of two. Shares bay with CVC sputter system, e-beam evaporator and thermal evaporator.

Lamp heated system, suitable for short-duration anneals. Gas option include nitrogen and pure air, for oxidative annealing

Lab: TIC Level 7 Cleanroom
Location: TIC
University of Strathclyde
Owner: Ian Watson
Contact: Ian Watson

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