MA6 Mask Aligner
Karl Suss, MA6
Social Distancing Instructions:
Room occupancy limit of three, likley to be used within one of two available litho slots. Closest proximity to microscopes at RHS of operator station.
Routinely used in contact mode, with resolution down to 2-3 microns.
TIC Level 7 Cleanroom
University of Strathclyde
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