MA6 Mask Aligner

Karl Suss, MA6

Social Distancing Instructions: Room occupancy limit of three, likley to be used within one of two available litho slots. Closest proximity to microscopes at RHS of operator station.

Routinely used in contact mode, with resolution down to 2-3 microns.

Lab: TIC Level 7 Cleanroom
Location: TIC
University of Strathclyde
Owner: Ian Watson
Contact: Ian Watson

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