STPS, Multiplex

Social Distancing Instructions: Room occupancy limit of seven, bay occupancy limit of two. Bay shared with second ICP tool, PE-CVD ssytem, two RIEs, Filmetrics reflectometer, Diener asher and Matrix system.

Preferred ICP tool for running potentially contaminative processes. Process gases include chlorine, oxygen and argon.

Lab: TIC Level 7 Cleanroom
Location: TIC
University of Strathclyde
Owner: Ian Watson
Contact: Ian Watson

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