ICP 1
Social Distancing Instructions: Room occupancy limit of seven, bay occupancy limit of two. Bay shared with second ICP tool, PE-CVD ssytem, two RIEs, Filmetrics reflectometer, Diener asher and Matrix system.
Preferred ICP tool for running potentially contaminative processes. Process gases include chlorine, oxygen and argon.
Lab: TIC Level 7 Cleanroom
Location: TIC
University of Strathclyde
Owner: Ian WatsonUniversity of Strathclyde
Contact: Ian Watson
Further information
Knowledgebase