Field-emission environmental SEM

Environmental (low vacuum) field emission scanning electron microscope (FEGSEM/ESEM)

• Oxford Instruments 150 mm² EDX silicon drift detector
• Oxford Instruments electron backscatter diffraction (EBSD) detector
• cathodoluminescence (CL) hyperspectral imaging
• backscatter, forescatter and wet-STEM detectors
• electron beam-induced current (EBIC)
• nanoprobes with low current measurement capability
• spring table for force measurements
• liquid nitrogen cooled cryo stage

All users must read and sign the risk assessment for general laboratory risks.