The JSM-6700F is a high resolution SEM with a field emission gun (FEG) electron source. It is equipped with a secondary electron detector for topographic contrast imaging, a retractable backscattered electron detector for atomic number contrast imaging and an Oxford Inca EDX system for compositional analysis.
Probe Current: 10-12-10-6 A
Accelerating Voltage: 0.5-30 kV
Specimen Size: 125 mm
Detectors: SE, EDX
More details are available from the St Andrews Electron Microscope Facility website.